Semiconductor Mechanical System

A Semiconductor Mechanical System is a complex network of interconnected subsystems and equipment designed to provide the precise environmental conditions and material handling required for semiconductor manufacturing. This system plays a crucial role in ensuring the efficient and reliable production of semiconductor devices.

One of the key components of a Semiconductor Mechanical System is the Chilled Water System. This system is responsible for providing cooling to various process equipment and tools throughout the fabrication facility. The Chilled Water System typically includes the following elements:

Cooling Tower: The cooling tower is a heat rejection device that removes heat from the chilled water system by evaporative cooling. It transfers the heat from the chilled water to the atmosphere, allowing the water to be recirculated and cooled.

Air-Cooled cs Water-Cooled Chiller: The water-cooled chiller is a refrigeration system that uses water as the cooling medium. It is responsible for removing heat from the chilled water loop and maintaining the desired water temperature for the various process tools and equipment. The choice between a water-cooled chiller and an air-cooled chiller depends on several factors, such as the facility's climate, available resources, and energy efficiency requirements. Water-cooled chillers are generally more efficient and have a higher cooling capacity, but they require a cooling tower and a water supply. Air-cooled chillers, on the other hand, do not require a cooling tower and can be a more suitable option in certain geographical regions or when water resources are limited.

Air Handling Unit (AHU): The Air Handling Unit is a critical component that conditions the air in the cleanroom environment. It controls the temperature, humidity, and air filtration to ensure the appropriate environmental conditions for the semiconductor manufacturing process.