Micro-Electromechanical Systems (MEMS) Technology

This course is about the microfabrication techniques and micro electromechanical systems (MEMS) technology. Applications of MEMS based devices are all over the globe. Mostly all sensors and actuators used in industry, automobiles, biomedical devices, domestic appliances, cell phones and wearable gadgets are MEMS based. In last few decades, due to small size, low cost and high efficiency and reliability, MEMS based sensors and devices have captured a huge market. Moreover, MEMS based sensors applications and usage is more spreading and are high in demand due to the emerging technologies, like, smart and autonomous systems, internet of things (IOTs), artificial intelligence (AI) and AI-OTs. The silicon (Si) based technology comprised of processes of photo-lithography, pattern transfer with wet and dry etching techniques, masking, surface micromachining, bulk micromaching, LIGA and micromolding and SU-8 molding and electroplating, soft lithography techniques will be discussed. Furthermore, the cleanroom where these MEMS sensors and actuators are produced is also briefly elaborated along do's and don'ts of cleanroom. 

Moreover, the course also include: Top-down and bottom-up manufacturing, Multi-User MEMS-Process, Poly MUMPs, Metal MUMPs, Silicon-On-Insulator MUMPs, Low cost microfabrication techniques, Soft lithography techniques, Mask making in L-Edit (photolithography), Micro sensors, micro actuators, micro fluidics, power MEMS, lab on the chip.