Teaching & Academics
Engineering
Nanotechnology
بالعربية Micro/Nano Fabricationأساسيات ال
4.5 (12 ratings)
Course Ratings are calculated from individual students’ ratings and a variety of other signals, like age of rating and reliability, to ensure that they reflect course quality fairly and accurately.
133 students enrolled

بالعربية Micro/Nano Fabricationأساسيات ال

Introduction to Microfabrication Techniques (Nanotechnology - تكنولوجيا النانو - نانوتكنولوجي)
New
4.5 (12 ratings)
Course Ratings are calculated from individual students’ ratings and a variety of other signals, like age of rating and reliability, to ensure that they reflect course quality fairly and accurately.
133 students enrolled
Created by Essam Berikaa
Last updated 7/2020
Arabic
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بالعربية Micro/Nano Fabricationأساسيات ال
Current price: $13.99 Original price: $19.99 Discount: 30% off
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This course includes
  • 3 hours on-demand video
  • Full lifetime access
  • Access on mobile and TV
  • Certificate of Completion
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What you'll learn
  • The physics behind micro and nano fabrication techniques
  • Learning about cleanroom environment
  • Gaining insights on the future of ICs fabrication techniques
  • Understanding the leverage of Silicon in photonics and micor-electro mechanical systems (MEMS)
  • Learning how to design a fabrication recipe for your device
  • Learning how these fabrication recipe can be simulated
  • Microfabrication and Nanofabrication methodologies
Requirements
  • Having interest in micro fabrication
Description

(شرح الدورة باللغة العربية)


This course takes you on a tour inside the cleanroom facility and explains the basic idea behind each of the micro/nano fabrication techniques. It is an introductory course that demonstrates the basic idea behind each technique along with its pros and cons without going through the mathematical details. However, this course provides a very comprehensive view of these processes with separate modules for: 

  • Patterning techniques

  • Oxidation

  • Etching

  • Deposition techniques

  • Doping

  • Metallization

  • Process integration & simulations

Moreover, some design practical aspects are also considered. So, it draws a comprehensive picture for the techniques used in most fields within the scope of Nanotechnology

Who this course is for:
  • Electronics bachelor students
  • Mechanical engineering bachelor students
  • Electrical and Computer Engineering Master students
  • Hardware Engineers (Digital and Analog)
Course content
Expand all 24 lectures 03:13:55
+ – Introduction
6 lectures 40:26

This video introduces the course content and shows the initial curriculum of the course

Introduction - Course overview
Preview 05:12

This video introduces the different applications of micro and nano fabrication techniques for different application domains: Silicon photonics (SiPh), micro/nano-electro-mechanical systems (M/NEMS), and integrated circuits (ICs) industry.

Motivation - Applications of micro and nano fabrication
04:03

This short lecture introduces concepts of Moore's law, scaling of transistors, and the definition of technology nodes. It highlights the significance of advancing micro and nano fabrication techniques.

Moore's law - Scaling of ICs
08:53

This video provides a very generic overview of the microfabrication processing steps.

Overview of the complete process flow
06:29

This video introduces the concept of the cleanroom, how they are classified, and the safety steps to get inside the cleanroom.

Cleanroom environment
09:29

This video explains why Silicon is a perfect material system for different technologies: Silicon photonics (SiPh), micro-electro-mechanical systems (MEMS), and integrated circuits (ICs) industry.

Overview of Silicon properties
06:20
+ – Patterning techniques - Lithography
3 lectures 46:47

This video explains the basics of lithography systems and focuses on the state of art deep ultraviolet photolithography process.

Photolithography
18:52

This lecture explains the current techniques used for resolution enhancement, including: optical proximity correction (OPC), Off-axis illumination (OAI), Phase-shift masking (PSM), Immersion lithography, double patterning, and spacer etching.

Resolution enhancement techniques (RETs)
Preview 18:16

This video introduces Extreme UV lithography, the most promising next-generation lithography techniques, highlighting its pros and cons.

Extreme UV lithography
09:39
+ – Oxidation
2 lectures 12:47

This video highlights the importance of oxidation process and explains the concept of thermal oxidation

Thermal oxidation
08:45

Following the last lecture, this video shows the alternative way of depositing oxide layers through chemical vapor deposition, and briefly compares thermally grown and deposited oxide layers.

Oxide deposition
04:02
+ – Doping
2 lectures 19:18

This lecture highlights the importance of doping. Then, it explains the basic principles and doping profile of the diffusion process

Diffusion
09:33

In this lecture, the ion implantation technique is explained. Followed by a comparison between diffusion and ion implantation.

Ion implantation
09:45
+ – Etching
2 lectures 15:52

This video explains the etching process and major figures of merits. Followingly, wet etching is explained.

Wet etching
08:35

This video explains the basic concept of dry etching with a special focus on deep reactive-ion etching (DRIE)

Dry etching
07:17
+ – Deposition techniques
5 lectures 29:46

In this module, we are introducing different deposition techniques. This video focuses on chemical vapor deposition and the usage of plasma to compensate for the high temperature. 

Chemical vapor deposition (CVD)
08:48

This video explains the basic idea behind atomic layer deposition (ALD), and why it has superior control over the film thickness

Atomic layer deposition (ALD)
06:06

This short video explains the basic principle of sputtering process and sputtering yield

Sputtering
04:35

This video explains the idea behind thermal evaporation and how it can be used in the deposition of metals.

Thermal evaporation
02:52

In this video we have reviewed the different deposition techniques, and investigated the practicality of each and their common applications

Pros and Cons of different deposition techniques
07:25
+ – Metallization
2 lectures 12:36

This video introduces the approach used in depositing different metals and some special flows as Damascene process and Silicidation. Additionally, practical aspects of metalization as electromigration and Aluminum spiking are explained.

Metallization
08:39

This lecture introduces the most common planarization technique, which is chemical-mechanical polishing (CMP)

Chemical Mechanical Polishing (CMP)
03:57
+ – Process integration
2 lectures 16:23

This video shows how the different microfabrication methods are integrated into a single flow to make a CMOS inverter.

IC Process Integration
07:38

This video introduces the idea of process flow simulation, and we went through the simulation of fabricating Si PN junction. The tool used in Simulation is Synopsis TCAD, mainly Sprocess.

Simulation of Process flow - TCAD from Synopsis
08:45